Mikrosistemler is specialized on inertial sensing using MEMS sensors. Both the angular rate sensors (gyroscopes) and linear acceleration sensors (accelerometers) that we currently develop depend on capacitive detection principles. These sensors together with special electronic control are capable of measuring exteremely small reactions of the MEMS element against external inertial inputs.
Mikrosistemler plans to fabricate its MEMS sensor designs using the patent-pending fabrication process developed at the METU-MEMS Research and Application Center. This process is capable of batch fabricating various MEMS structures that can be hermetically packaged at the wafer-level and in a controlled atmosphere.
INERTIAL SENSING WITH MEMS
Wafer-level hermetic packaging with vertical feedthroughs
* Patent pending (METU-MEMS Research Center)
* 1 femto-meter = (1 mm / 1,000,000) / 1,000,000