INERTIAL SENSING WITH MEMS
* 1 femto-meter = (1 mm / 1,000,000) / 1,000,000
Feel the motion
as small as femto-meters*
using capacitive detection techniques
Mikrosistemler is specialized on inertial sensing using MEMS sensors. Both the angular rate sensors (gyroscopes) and linear acceleration sensors (accelerometers) that we currently develop depend on capacitive detection principles. These sensors together with special electronic control are capable of measuring exteremely small reactions of the MEMS element against external inertial inputs.
Wafer-level hermetic packaging with vertical feedthroughs
Mikrosistemler fabricates its MEMS sensor designs using its patented fabrication process. This process is capable of batch fabricating various MEMS structures that can be hermetically packaged at the wafer-level and in a controlled atmosphere.